architectural rendering of cleanroom courtesy of HALFF Associates, Inc

The UNT Nanofabrication Cleanroom is being built and will be maintained by the University of North Texas to support the research needs of faculty and students from a broad range of engineering and science disciplines.   The cleanroom occupies approximately 3000 sq. ft. of clean space and includes a Class 100 lithography area and a Class 10,000 wet and dry processing and characterization area.  Initial capabilities will emphasize nano/micro device development and thin film techniques.  Highlights of the tool list include:

  • Electron Beam Lithography/Scanning Electron Microscope
  • Electon Beam and Sputtering Combo Thin Film Deposition System
  • Thermal Evaporation Thin Film Deposition System
  • Direct Write Maskless Laser Lithography System
  • Reactive Ion Etchers (RIE)

For a complete list of tools to be included and the layout of the facility, see the Tools and Instrument page.

The cleanroom is located in the E-wing of Discovery Park, adjacent to what will be the new home of the Center for Advanced Research and Technology (CART), UNT’s university-run facility and one of the most advanced of its kind in the nation for research involving materials synthesis and analysis, from atomic to macro scales. The co-location of the cleanroom to a newly modernized and consolidated CART will provide researchers with convenient access to a broad range of capabilities for materials synthesis, device fabrication, and analysis. 

Construction is completed in May 2012.  Utility connection for the tools has started in July 2012. Individual tool installation, testing and training will follow. The cleanroom is expected to be partially operational by fall 2014.

The nanofabrication cleanroom and CART facilities are also adjacent to UNT’s new technology incubator, thus providing easy access to these state-of-the-art facilities for start-up companies needing such capabilities.  Arrangements can also be made to accommodate the needs of users from outside the University.

For information about cleanroom capabilities or other details, contact Dr. Jianchao Li, Nanofabrication Facilities Manager.  More information will be posted here as it becomes available, including updated information on the progress of construction and protocols for use of the facility. 


Contact Us:
UNT Discovery Park
University of North Texas
3940 North Elm, Suite A-101N
Denton, TX 76207-7102 USA
Voice: 940-369-5318

Visit Us:
UNT Discovery Park, 3940 North Elm, Suite A-101N http://research.unt.edu/nanofabrication/
Email us:

Have questions on content or technical issues? Please contact us. kelber@unt.edu

UNT System:

Site last updated on August 5, 2014

Disclaimer | AA/EOE/ADA | Privacy Statement | Web Accessibility Policy | State of Texas Online | Emergency Preparedness