Cleanroom exterior

Architectural rendering of cleanroom courtesy of HALFF Associates, Inc

UNT Center for Microelectronics in Extreme Environments: Cleanroom

Precision Fabrication for Advanced Materials and Device Innovation

The UNT Center for Microelectronics in Extreme Environments: Cleanroom is a state-of-the-art fabrication and processing facility maintained by the University of North Texas to support the research needs of faculty and students from a broad range of engineering and science disciplines.

Spanning 2,600 square feet of clean space, the facility provides researchers and students from across engineering and science disciplines with the tools to prototype, process, and analyze high-performance materials and devices — particularly for extreme environment applications such as space systems, defense electronics, and high-radiation environments.

Cleanroom Capabilities

The cleanroom includes:

  • Class 100 lithography suite (~300 sq. ft.)
  • Class 10,000 wet/dry processing and characterization zones

Initial research and development focus areas include:

  • Nano/micro-device fabrication
  • Photomask creation
  • Advanced thin film deposition
  • Surface and structural characterization

Highlights of the tool list include:

  • Electron Beam Lithography/Scanning Electron Microscope
  • Ion Assist Electron Beam and Sputtering Combo Thin Film Deposition System
  • KLA-Tenco Profiler
  • Heidelberg DWL 66 Maskless Laser Lithography System
  • Laurell chemical processing stations
  • Reactive Ion Etchers (RIE)
  • Trovato 12 source thermal evaporator with 4 material co-deposition

Designed for Collaboration

The CMEE Cleanroom is open to:

  • UNT researchers and students
  • External collaborators and partners
  • Startup and industry users seeking access to advanced prototyping and fabrication infrastructure

Whether advancing microchip designs, testing materials for space and defense, or training the next generation of semiconductor engineers, the cleanroom supports mission-critical research and development that aligns with UNT’s commitment to national innovation and workforce needs.